USING ALE-FEM TO SIMULATE THE INSTABILITY OF BEAM-TYPE NANO-ACTUATOR IN THE PRESENCE OF ELECTROSTATIC FIELD AND DISPERSION FORCES

10.22099/ijstm.2013.1461

Abstract

Abstract– The ability of mesh design in arbitrary Lagrangian-Eulerian finite element method
(ALE-FEM) makes it a generally efficient device for simulating engineering problems. In this
paper, ALE-FEM is used to model the static deflection and instability of beam-type cantilever
nano-actuators using plain element. Effects of electrostatic fields are taken into account through
first-order fringing field corrected model. In addition, the influence of quantum vacuum
fluctuations is considered via attractive Casimir and van der Waals force depending on the range
of application. The instability parameters, i.e. pull-in voltage and deflection of the nano-actuator
are computed. The obtained results are compared with those reported in literature using numerical
method as well as Lagrangian FEM. The findings indicate that ALE method can be used as a
powerful technique for modeling beam type nano-actuator.

Keywords